Comparing Shadow Moiré and Digital Fringe Projection Warpage Metrology TechniquesAuthors: Neil Hubble and Leon Weaver
Date Published: 9/17/2017 Conference: SMTA International
Warpage measurements are performed in a controlled environment using the same metrology equipment with only the optical metrology changed between the two techniques. Using the same oven for both technologies is critical for warpage comparisons. Under this controlled environment, multiple samples are tested for warpage over temperature in order to show statistical relevance of data between the techniques, as well as find specific examples where the techniques have comparable or dissimilar warpage measurements. Shadow moiré data is processed using a greater camera bit depth than previous studies, along with new software to work with shadow moiré and discontinuous surfaces, historically an area where only DFP could be used to measure across sudden height changes.
Warpage, metrology, shadow moiré, digital fringe projection
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