Unique Polymer Coating Process for Improving Performance and Reliability of 3D Wafer Level PackagingAuthors: Antun Peic, Ph.D., Felix Massa, Johanna Bartel, Thorsten Matthias, Ph.D., Markus Wimplinger, Thomas Uhrmann, Ph.D., and Paul Lindner
Company: EV Group
Date Published: 11/11/2014 Conference: IWLPC (Wafer-Level Packaging)
Utilizing EVG®NanoSprayTM technology, this technique can create passivation layers that protect against corrosion, but also provide isolation to reduce electrical substrate noise, as well as create compliant layers to mitigate thermo-mechanical stress. [1,2] Investigations on polymer-lined TSVs have demonstrated electrical improvements, including a significant reduction in capacitance density compared to conventional SiO2 insulating TSVs as well as an outstanding reduction in leakage current. [1,2] Herein we present an investigation based on finite element analysis (FEA) results for different TSV types with polymer-coated via sidewalls. In particular, we provide the process for a TSV design solution that leverages intrinsic thermo-mechanical properties of polymer-coated via sidewalls and thus a vertical interconnect type that is more forgiving on coefficient of thermal expansion (CTE) mismatch-induced stress between silicon substrate and the interfacing metal.
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