Towards Large Area Roll-To-Roll (R2R) Flexible Multilayer ElectronicsAuthors: Denisse E. Yepez, M.S.; Daryl L. Santos, Ph.D.; Bahgat Sammakia, Ph.D.; and Mark D. Poliks, Ph.D.
Company: Binghamton University and Endicott Interconnect Technologies, Inc.
Date Published: 2/14/2012 Conference: Pan Pacific Symposium
Essentially, this research will provide some of the first parameter settings for a photolithography tool and the first steps into achieving the development of devices. The purpose of this research is to demonstrate the preliminary overlay data from the photolithography equipment in R2R format of two flexible substrates. These two substrates are polyethylene therephthalete (PET) and polyimide (PI). Hence, this paper explores the overlay components calculated for photolithography using two flexible substrate materials. The techniques applied for the comparison of both substrate types are descriptive statistics and run-charts of the overlay data components. The techniques will demonstrate the behavioral trends between both substrates.
flexible electronics, roll-to-roll, PET, PI, integrated circuits
Members download articles for free:
Not a member yet?
What else do you get when you join SMTA? Read about all of the benefits that go along with membership.
Notice: Sharing of articles is restricted to just your immediate work group. Downloaded papers should not be stored on an external network or shared on the internet.