Pan Pacific Symposium Conference Proceedings

3D Nanofabrication Using Heated Probes - Towards MHZ Patterning Rates

Authors: A. W. Knoll, P. Paul, F. Holzner, M. Despont, U. Duerig, and J. L. Hedrick
Company: IBM Research
Date Published: 1/18/2011   Conference: Pan Pacific Symposium

Abstract: A high throughput high-resolution probe based patterning method is presented using organic resists that respond to the presence of a hot tip by local material decomposition and desorption. Thereby arbitrarily shaped patterns can be written in the organic films in the form of a topographic relief. Fabrication of three dimensional patterns is done in a single patterning step by controlling the amount of material removal. Recent progress enables patterning rates of 400 kHz and read-back rates of >600 kHz, limited only by the mechanical response of the cantilever. Both the polymer decomposition dynamics and the mechanical stability of the setup allow scaling to higher frequencies of 1 MHz or above. The new technique offers a cost-effective and competitive alternative to high-resolution electron-beam lithography in terms of both resolution and speed.

Key words: Nanofabrication, AFM, Scanning Probe Lithography.

Members download articles for free:

Not a member yet?

What else do you get when you join SMTA? Read about all of the benefits that go along with membership.

Notice: Sharing of articles is restricted to just your immediate work group. Downloaded papers should not be stored on an external network or shared on the internet.


SMTA Headquarters
6600 City West Parkway, Suite 300
Eden Prairie, MN 55344 USA

Phone +1 952.920.7682
Fax +1 952.926.1819