3D Nanofabrication Using Heated Probes - Towards MHZ Patterning Rates
Authors: A. W. Knoll, P. Paul, F. Holzner, M. Despont, U. Duerig, and J. L. Hedrick Company: IBM Research Date Published: 1/18/2011
Pan Pacific Symposium
Abstract: A high throughput high-resolution probe based patterning method is presented using organic resists that respond to the presence of a hot tip by local material decomposition and desorption. Thereby arbitrarily shaped patterns can be written in the organic films in the form of a topographic relief. Fabrication of three dimensional patterns is done in a single patterning step by controlling the amount of material removal. Recent progress enables patterning rates of 400 kHz and read-back rates of >600 kHz, limited only by the mechanical response of the cantilever. Both the polymer decomposition dynamics and the mechanical stability of the setup allow scaling to higher frequencies of 1 MHz or above. The new technique offers a cost-effective and competitive alternative to high-resolution electron-beam lithography in terms of both resolution and speed.