THE MEMS APPROACH FOR MAKING A LOW COST, HIGH SENSITIVITY MAGNETIC SENSOR
Authors: Alan S. Edelstein, Greg A. Fischer, James E. Burnette and William F. Egelhoff, Jr. Company: U.S. Army Research Laboratory and National Institute of Standards and Technology Date Published: 10/11/2010
IWLPC (Wafer-Level Packaging)
Abstract: MEMS flux concentrator magnetometers have been successfully fabricated and tested. Using the MEMS flux concentrator, the operating frequency of small magnetic sensors has been shifted above the region where 1/f noise dominates. This has been accomplished by modulating the field via the oscillatory motion of flux concentrators on MEMS flaps, which are actuated by an electrostatic comb drive system. This sensor should outperform all other high sensitivity vector magnetometers in terms of cost, power consumption, and sensitivity. Vacuum packaging of the device can lead to an increase in the quality factor Q and further reduce power consumption requirements.