SMTA China Conference Proceedings


THE CT REVOLUTION: HIGH-SPEED µ-FOCUS X-RAY COMPUTED TOMOGRAPHY FOR SEMICONDUCTOR AND SMT APPLICATIONS

Authors: Dr. Jens Peter Steffen, Dr. Andreas Lechner
Company: COMET GmbH, Business Unit FEINFOCUS D-30827
Date Published: 4/22/2007   Conference: SMTA China


Abstract: Computed tomography (CT) is the preferred way for 3-dimensional analysis of state-of-the-art semiconductor packaging solutions, such as System-in-a-Package, as well as general complex assemblies. Current µ-focus X-Ray systems offer high resolution and advanced detail detectability. However, current CT systems suffer from major limitations in terms of speed and throughput which are important requirements in industrial CT application. This paper demonstrates the extension of CT-applicability from the lab to the production floor. Technological details are provided in addition to practical demonstrations of COMET’s approach to combat the major bottlenecks of current CT systems. Key Words: µ-Focus Computed Tomography, µCT, Fast Scanning, Quality Assurance, Production, High-Power-Target



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