MICRO ELECTRO MECHANICAL SYSTEMS BASED ULTRASONIC SENSORS FOR NON DESTRUCTIVE EVALUATION
Author: Karthik Tondapu Company: Department of Electrical and Computer Engineering University of Missouri Date Published: 1/31/2007
Pan Pacific Symposium
Abstract: Non Destructive Evaluation finds a vital place in the structural engineering for the evaluation of the conditions of various building structures. The use of transducers as health monitoring tool for condition assessment of civil infrastructure is discussed. A study of the application of MEMS used in the field of Structural Engineering is done in this paper. The unanimous features like high sensitivity, durability, low-cost, compatibility to wireless system and miniaturization of device has made it a better choice to use the MEMS technology for the modeling of such tools. MEMS based sensors with special characteristics like piezoelectricity, piezoresistivity coupled with the attractive properties of silicon have been harnessed to a great extent. This paper is a literature review of various technical articles and reports giving a brief knowledge of the way the field of Micro Electro Mechanical System is exploited for the use in non destructive evaluation in civil engineering. Keywords: NDE, ultrasonic waves, capacitive transducer, MEMS.