Pan Pacific Symposium Conference Proceedings


THREE-DIMENSIONAL INTELLECTUAL SENSORS OF MAGNETIC FIELD ON THE BASE OF HALL EFFECT

Author: Fuad Kasimov
Company: Azerbaijan Ntn'l Space Agency
Date Published: 1/25/2000   Conference: Pan Pacific Symposium


Abstract: Perspectives of using three-dimensional structures, those elements is arranged in isolated oxide film, as well as on substrate have been shown. Most wide opportunities for formation complex microstructures has the technology of re-crystallization of polysilicon films on oxide by laser irradiation. Experimental results on use of laser re-crystallization of silicon layers for formation discrete Hall sensors capable to integration in SOI microsystem are given and their parameters are presented. Key words: poly-Si films, laser re-crystallization, Hall sensor, microsystem.



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