Medical Electronics Symposium Conference Proceedings


Authors: G. Hughes, A. Geisberger, K. Tsui, N. Sarkar
Company: Zyvex Corporation
Date Published: 5/19/2004   Conference: Medical Electronics Symposium

Abstract: The medical device industry and patients alike continue to benefit from the miniaturization of devices and components. Minimally-invasive surgical tools, implantable life-enhancing devices, and portable diagnostic equipment have all progressed due to advances in miniaturization. The progress of miniaturization continues with the growing emphasis in microelectromechanical systems (MEMS) and the emerging field of nanotechnology. The monolithic, or wafer-level, MEMS approach has successfully produced various miniature technologies, mostly comprised of simple systems such as pressure sensors and accelerometers. Computer-controlled microassembly of MEMS and other components will enable the manufacture of unprecedented medical microsystems for applications ranging from portable diagnostic equipment to miniature surgical tools.

This paper will discuss current techniques of microassembly and nanomanipulation and will present potential applications of such techniques in the development and fabrication of complex microsystems. Through a $25M NIST-ATP award, our company has developed a microassembly approach that uses silicon micromachined components, such as grippers and connectors, integrated with high precision robotic systems. The assembly process achieves +/- 1 micron in positional accuracy of placed components. Furthermore, components fabricated from different materials and various MEMS processes can be precisely assembled to form truly complex microsystems such as photonic assemblies, miniature wireless systems, precision microactuators, and sensor arrays.

Key words: MEMS, microassembly, biomedical, microsystems.

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