PRECISION ASSEMBLY UTILIZING MICROELECTROMECHANICAL SYSTEMS AND NANOTECHNOLOGY: THE ENABLING OF MEDICAL MICROSYSTEMSAuthors: G. Hughes, A. Geisberger, K. Tsui, N. Sarkar
Company: Zyvex Corporation
Date Published: 5/19/2004 Conference: Medical Electronics Symposium
This paper will discuss current techniques of microassembly and nanomanipulation and will present potential applications of such techniques in the development and fabrication of complex microsystems. Through a $25M NIST-ATP award, our company has developed a microassembly approach that uses silicon micromachined components, such as grippers and connectors, integrated with high precision robotic systems. The assembly process achieves +/- 1 micron in positional accuracy of placed components. Furthermore, components fabricated from different materials and various MEMS processes can be precisely assembled to form truly complex microsystems such as photonic assemblies, miniature wireless systems, precision microactuators, and sensor arrays.
Key words: MEMS, microassembly, biomedical, microsystems.
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