DEVELOPMENT OF A MICRO-SIZED, CERAMIC, SURFACE MOUNT LOAD CELL FOR LIFE SCIENCE APPLICATIONSAuthors: Robert Allen, Benjamin Schnitz, Jeffrey Stewart
Company: MicroNova Technology, Inc.
Date Published: 5/19/2004 Conference: Medical Electronics Symposium
The unique assembly incorporates an 8-post leadless inverted device fabricated via dry-pressed ceramic and micro-machining processes. The resulting alumina (~96%) configuration is patterned via a sputtered nickel-gold metallization over a sintered moly-manganese or tungsten base metal for the interconnection posts (external solder pads) and internal component attachment of the semiconductor micro-strain gage and low profile resistors. Custom patterns and internal component isolation are accomplished via laser scribing. The dry-pressed ceramic provides a bio-compatible and very smooth rigid body that allows forces to be applied to the backside (top after mounting) of the load cell. Resulting strains and forces are transduced using an internal Wheatstone bridge configuration with surface mount 0201 resistors.
This paper discusses the materials science and finite element analysis that contribute to the design feasibility of a micro-sized, ceramic, surface mount load cell. Various medical applications are briefly discussed.
Key words: dry-pressed ceramic, 96% alumina, Micro-LIDs(TM), leadless inverted devices, load cell, semiconductor micro-strain gage, finite element analysis; Wheatstone Bridge.
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