GETTING SMALL WITH DIP PEN NANOLITHOGRAPHYAuthor: S. Cruchon-Dupeyrat
Company: NanoInk, Inc.
Date Published: 9/21/2003 Conference: SMTA International
In the following, we discuss (1) the DPN process; DPN-enabling technologies, including (2) arrays of (individually actuated) cantilevers for parallel, high-throughput lithography and (3) microfluidics for multiple ink delivery. The DPNWriteTM software, a computer-aided design and instrument control platform capable of fabricating and aligning nanopatterns, and the newest NSCRIPTORTM DPNWriterTM instrument is also briefly overviewed.
Key words: high-throughput nanolithography, MEMS cantilever array, microfluidics, nanoElectronics.
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