Pan Pacific Symposium Conference Proceedings


Authors: Sterken, Baert, Puers, Borghs, Mertens
Company: IMEC vzw
Date Published: 2/18/2003   Conference: Pan Pacific Symposium

Abstract: Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power-generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy.

The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters.

These models show the possibility of generating up to 40 µW with a device of 10 mm2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 µW at 1020 Hz is expected.

Key words: micro-generator, electret, modeling, SOI.

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