Pan Pacific Symposium Conference Proceedings


A NEW POWER MEMS COMPONENT WITH VARIABLE CAPACITANCE

Authors: Sterken, Baert, Puers, Borghs, Mertens
Company: IMEC vzw
Date Published: 2/18/2003   Conference: Pan Pacific Symposium


Abstract: Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power-generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy.

The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters.

These models show the possibility of generating up to 40 µW with a device of 10 mm2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 µW at 1020 Hz is expected.

Key words: micro-generator, electret, modeling, SOI.



Members download articles for free:

Not a member yet?

What else do you get when you join SMTA? Read about all of the benefits that go along with membership.

Notice: Sharing of articles is restricted to just your immediate work group. Downloaded papers should not be stored on an external network or shared on the internet.


Back


SMTA Headquarters
6600 City West Parkway, Suite 300
Eden Prairie, MN 55344 USA

Phone +1 952.920.7682
Fax +1 952.926.1819