A NEW POWER MEMS COMPONENT WITH VARIABLE CAPACITANCEAuthors: Sterken, Baert, Puers, Borghs, Mertens
Company: IMEC vzw
Date Published: 2/18/2003 Conference: Pan Pacific Symposium
The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters.
These models show the possibility of generating up to 40 µW with a device of 10 mm2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 µW at 1020 Hz is expected.
Key words: micro-generator, electret, modeling, SOI.
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