SMTA International Conference Proceedings


Author: L. A. Hornak et al.
Company: West Virginia University
Date Published: 9/22/2002   Conference: SMTA International

Abstract: For certain classes of MEMS applications, implementation of closed loop feedback control and system model-based fault detection offer significant performance advantages. Such systems include those in safety critical applications and systems in which dynamic loads are anticipated.

Detailed continuous knowledge of the positional state of the microstructure is needed in order for accurate system models to be developed and experimentally verified, control techniques to be effectively applied, and the model-based fault detection evaluated.

Moreover, this positional state information must be fully decoupled from the microstructure voltage drive signal. This paper reviews current efforts exploring the use of integrated optics to provide this MEMS state feedback information and the merits and challenges of its application for microstructure control and fault detection.

Results of modeling and experiments with a 1.3 micron wavelength coherent optical probe for optical state monitoring with specialized microstructure features are presented as well as results of work integrating the probe optics within a folded diffractive optical element coplanar with the MEMS die. Use of this approach for optics integration into a MEMS package for quality assurance and reliability performance predictor also discussed.

Key words: MEMS, through-wafer optics, integrated optical metrology, fault prediction.

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