IWLPC (Wafer-Level Packaging) Conference Proceedings


Wafer-Level Vacuum Packaging of Microbolometer-Based Infrared Imagers

Authors: Allan Hilton, Dorota S. Temple, John Lannon, Thomas R. Schimert, George Skidmore, Roland Gooch, Carlos Trujillo, Scott Miskimins, Chuan Li
Company: Micross Advanced Interconnect Technology and DRS Technologies
Date Published: 10/18/2016   Conference: IWLPC (Wafer-Level Packaging)


Abstract: Microbolometer focal plane arrays (FPAs) require an ambient with a total pressure of less than 10 mTorr for optimum sensitivity. A wafer-level vacuum packaging process greatly reduces the cost of the FPA component and makes the packaged device lighter and smaller in comparison with the traditional one-die-at-a-time packaging approach. To meet the package requirements of microbolometer FPAs, we have developed a wafer-to-wafer bonding technique based on Cu-Sn solid-liquid interdiffusion (SLID). By bonding microbolometer FPA wafers with silicon window wafers that were coated with thin-film getters and anti-reflective films, arrays of micro vacuum chambers were created in parallel. The SLID based vacuum-packages demonstrated electro-optical performance consistent with the performance of the FPAs in traditional die-level vacuum packages. The developed bonding process may be also be applicable to other smart sensor microsystems, as they are transitioning from multi-chip configurations to system-on-chip architectures that reduce size, weight, power, and cost.

Key Words: 

wafer-level vacuum packaging, SLID bonding, infrared focal plane arrays, thermal imagers



Cost to download:

  Members: Free! (Log on to receive the member rate)
  Non-Members: $10

Why become an SMTA member?

Not a member yet? Join SMTA today!

Notice: Sharing of articles is prohibited. Downloaded papers must only be stored on a local hard drive and not in a shared repository either internal or external.


Back


SMTA Headquarters
6600 City West Parkway, Suite 300
Eden Prairie, MN 55344

Phone 952.920.7682
Fax 952.926.1819
Home
Site Map
Update Your Info
Related Links
Send Us Feedback
Contact Us
Privacy Policy
↑ Top